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Sensirion SFM6000D Mass Flow Controllers

Mar 15 2023 2023-03 Semiconductors Sensirion AG
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Sensirion SFM6000D Mass Flow Controllers are valve-less SFC6000 mass flow controller variants. The Sensirion SFM6000D offers performance at a low price.

Sensirion SFM6000D Mass Flow Controllers are valve-less SFC6000 mass flow controller variants. The Sensirion SFM6000D  offers performance at a low price. The controllers are small, lightweight,  and ideal for optimizing the size and weight of portable devices. With excellent repeatability,accuracy,  control range, and speed, this highly integrated controller is built using CMOSens  MEMS technology.

 

Features

● Unbeatable price-performance ratio with 2%/0.2% accuracy/repeatability. Unbeatable price-performance ratio with 2%/0.2% accuracy/repeatability
● Opens up applications where a mass flow controller is traditionally too costly
● Wide control range (0.2%-100% full scale)
● Calibrated for multiple gasses with exchangeable fittings
● Digital RS485 interface
● Compact and lightweight
● Integrated design with few electronic components
● Robust supply chain to enhance supply safety
● No drift and re-calibration is required in the field
● EK-F5x evaluation kit for quick and easy testing

 

Applications

● Semiconductor
● Analytical instruments
● Medical equipment
● Industrial automation

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