Melexis pioneered Triphibian technology to revolutionize MEMS pressure sensors

     Melexis has announced the launch of the MLX90830, the first pressure sensor chip using the newly patented Triphibian technology. This MEMS pressure sensor is designed in unprecedented miniaturization to robustly measure pressure in gas and liquid media from 2 to 70bar. The device is factory-calibrated by Melexis to measure absolute pressure and provide a proportional analog output signal. The MLX90830 simplifies module integration with the latest electric vehicle (EV) thermal management systems, making the modules more cost-effective.

     The MLX90830 is based on Melexis' breakthrough Triphibian technology, which not only enables MEMS (microelectromechanical system) sensors to achieve accurate measurements well above 5bar, but also liquid contact measurements. The MLX90830 has a unique construction that breaks new ground, enabling both high pressure sensing and compatibility with gases and liquids. The sensor chip comes in a SO16 widebody package with an internal cantilever with a sensing film at the tip.

     The sensor chip's suspension cantilever design provides peak pressure immunity up to 2000bar/msec and static burst pressure levels up to 210bar. By default, the device offers two pressure range calibration ranges (10bar, 35bar), each tailored to the needs of electric vehicle thermal management systems, including low and high pressure refrigerant refrigeration circuits. The MLX90830 is designed to be more robust than a backside exposed solution, as the former still has a pressure difference between the glass base side and the lead bonding side. In addition, the principle of pressure equalization also applies to frozen media, so the MLX90830 can operate in such conditions, which is a first for MEMS pressure sensors.

     The MLX90830 is designed to be more precise and robust than existing non-MEMS designs, helping to optimize the efficiency of the vehicle's thermal management system for longer driving distances. In addition, its compact embedded package reduces the size of the sensor chip compared to the standalone sensor chip module.

     The MLX90830 contains sensors, signal processing circuits, digital hardware, voltage regulators, and analog output driver chips. A piezoresistive element implanted in the sensing membrane forms a Wyeth bridge to generate an output signal. After amplification, the signal can be converted into a digital signal, temperature compensated by 16-bit digital signal processing (DSP), and finally analog voltage output is provided by a digital-to-analog converter.

     The sensor chip features advanced protection against overvoltage (above +40V) and reverse voltage (below -40V), making it ideal for large vehicle applications. The MLX90830 is an independent safety unit (SEooC) developed according to the ISO26262 standard and supports ASIL Level B system integration to ensure that the latest electric vehicle safety requirements are met.

     "Miniaturized MEMS pressure sensors based on Triphibian™ technology and accurately factory calibrated by Melexis centralize the thermal management system for electric vehicles, reducing system size and increasing reliability." "Customers can design the MLX90830 into a standalone pressure sensor or easily embed it into a system," says Karel Claesen, Product manager for pressure sensor chips.

     "With Triphibian technology, MEMS sensor chips can increase the level of pressure that can be measured and expand the type of media that can be used." Laurent Otte, Senior product Line Manager, explains, "Melexis has solved a problem that was previously impossible to solve with MEMS technology, and now we can measure the pressure of liquid media, opening up new possibilities for the automotive industry and other applications."