Advanced Energy's New Power Meter

     Advanced Energy announces an RF power meter, model GEMINI 5540A. This new power meter incorporates a set of highly flexible, easy-to-use, and highly integrated measurement circuits that support highly accurate online RF power measurements and are suitable for scenarios that require high-precision RF power control, such as Products such as semiconductors, communication systems, industrial products, and medical equipment. Advanced Energy has been the market leader in RF power solutions for semiconductor products, and the company will continue to work hard to develop new technologies to improve plasma power control capabilities and enhance the performance of advanced etch and deposition processes.

     The GEMINI 5540A is a sensor and measurement instrument in one that is easy to use and can perform measurement functions in the frequency range from 0.2 to 200MHz and the power range from 3 to 5,000W, with its 2-sigma Accuracy is ±0.5% + 0.5 W. This is a highly integrated measurement instrument that allows users to replace many different measurement instruments with just one measurement instrument, and is most suitable for equipment that needs to accurately measure and control its RF power.

     Gerry Blumenstock, Vice President, Critical Sensing and Control Products at Advanced Energy, said: "The performance of highly technically demanding semiconductor processes, such as high aspect ratio (HAR) plasma etching, precision control and chamber matching for RF systems, has Directly affected by the technology used. OEMs using Advanced Energy’s new GEMINI 5540A measurement technology can accurately calibrate their systems and monitor their RF power in real time, improving the fidelity and consistency of advanced plasma processes.”

     The GEMINI 5540A RF Power Meter features a large, easy-to-read OLED digital display that simultaneously displays forward and reverse power, Voltage Standing Wave Ratio (VSWR), and frequency, without the need to recreate forward and reverse power measurements. configuration, the frequency can also be automatically detected. This gauge reduces the number of calibrations to once every 12 months. In contrast, traditional measuring instruments need to be calibrated every 6 months. This RF power meter operates with a 5V input voltage, 500mA input current, but requires connection to an external battery or AC outlet via a standard USB 2.0 port, or an off-the-shelf USB adapter for AC power.

     In addition to direct measurement, the meter can also be connected to a computer for data collection, storage and review in conjunction with Advanced Energy's GEMINI Tools data visualization software.