Advanced Energy's 10kW power supply with advanced pulse function

     Advanced Energy has been committed to the development of various advanced high-precision power conversion, measurement and control systems and other solutions, and this technology has been leading the world. The company announced another new addition to its plasma power supply family, a new 10kW pulsed DC power supply featuring industry-leading power and control features and pre-installed PowerInsight by Advanced Energy, an embedded process optimization program. The Ascent® SMS AP (Advanced Pulse) power supply features patented pulsing technology that brings optimized arc management and precise plasma power control to the most demanding thin film deposition applications ranging from semiconductor to solar Applications in photovoltaic cell production, etc.

     This 10kW Ascent SMS AP power supply is small in size, yet has an extremely wide Safe Operating Area (SOA) range such as peak voltages up to 1200V and frequencies between 0.5 and 150kHz. The progressive arc management system of this power supply has 4 different units and supports full range reverse voltage operation. It is the most advanced power supply solution in the industry. It stores the least arc energy and provides arc parameters. It can be self-adjusted, so that the relevant parameters can be flexibly adjusted according to the process steps. The output advanced pulse (AP) waveform can support functions such as boost, reverse voltage control, and advanced pulse shaping, so as to achieve fine-tuning of the waveform according to the film type and required film characteristics.

     Dhaval Dhayatkar, Senior Marketing Director of Advanced Energy's Plasma Power Products, said: "Advanced Energy will continue to work on improving the performance of pulsed DC power supplies to ensure that this range of products is suitable for single target magnetron sputtering applications, and also has the advantages of older products. Unmatched adaptability. This new 10kW Ascent SMS AP power supply takes advantage of many of Advanced Energy's cutting-edge technologies, including highly configurable waveforms, progressive arc management, better-in-class Safe Operating Area (SOA) range, The broad frequency range, along with our company's PowerInsight process optimization software, allows our customers to maximize the precision, repeatability and production yield of advanced semiconductor process technology."

     This new power supply is Advanced Energy's first power supply with the PowerInsight process characterization application and associated optimization software pre-installed. This PowerInsight software collects, analyzes and interprets data from critical feed systems, allowing users to use this extremely useful data to optimize process processes to increase throughput and production yields, and reduce unpredictable process equipment downtime . Because of the PowerInsight software built into this range of pulsed DC power supplies from Advanced Energy, arcing can be reduced, deposition rates can be increased, and film layer morphology and properties can be improved.